Jocelyn Achard1 Riadh Issaoui1 Alexandre Tallaire1 2 Ovidiu Brinza1 Vianney Mille1 Audrey Valentin1 André Tardieu1 Fabien Bénédic1

1, LSPM-CNRS, Villetaneuse, , France
2, IRCP - Ecole Nationale Supérieure de Chimie de Paris, Paris, , France

Diamond is a transparent wide band gap material with outstanding optical and electronic properties that are attracting a lot of attention for the development of the next generation of devices. Indeed single crystal diamond provides an ideal host material to incorporate different types of impurities that can drastically modify its properties. The use of dopants such as boron can for example allow tuning the electrical conductivity of the film up to the metallic conduction which could allow to produce highly boron doped substrates and develop vertical components whose design and architecture for the realization of more complex function is simpler. In addition nitrogen or silicon are some of the elements that can be introduced in the crystal in order to create optically active centres such as the well-known NV (nitrogen-vacancy) and SiV (silicon-vacancy). Both defects exist in different charge states that can be stabilized depending on the doping level of the diamond.
In this presentation, we will focus more specifically on the production aspects of doped monocrystalline diamond films by chemical vapour deposition assisted by microwave plasma with either boron or nitrogen, highlighting all the constraints inherent to the targeted field of application. In the case of boron doping, particular attention will be paid to showing the plasma conditions which it is essential to maintain in order to obtain a sufficiently thick and doped film leading to on state resistances compatible with their use in vertical components. It will be shown in particular the importance of the gas composition to inject high microwave power allowing coupling high material quality with high growth rate. With regard to nitrogen doping, the conditions for optimizing the formation and orientation of NV colour centres will be discussed and the role of temperature, substrate orientation and gas composition will be highlighted.